A Piezoelectrically Excited ZnO Nanowire Mass Sensor with Closed-Loop Detection at Room Temperature

Overview

Journal Micromachines (Basel)

Publisher MDPI

Date 2022 Dec 23

PMID 36557541

Authors

Xianfa Cai

Lizhong Xu

Affiliations

Soon will be listed here.

Abstract

One-dimensional nanobeam mass sensors offer an unprecedented ability to measure tiny masses or even the mass of individual molecules or atoms, enabling many interesting applications in the fields of mass spectrometry and atomic physics. However, current nano-beam mass sensors suffer from poor real-time test performance and high environment requirements. This paper proposes a piezoelectrically excited ZnO nanowire (NW) mass sensor with closed-loop detection at room temperature to break this limitation. It is detected that the designed piezo-excited ZnO NW could operate at room temperature with a resonant frequency of 417.35 MHz, a quality factor of 3010, a mass sensitivity of -8.1 Hz/zg, and a resolution of 192 zg. The multi-field coupling dynamic model of ZnO NW mass sensor under piezoelectric excitation was established and solved. The nonlinear amplitude-frequency characteristic formula, frequency formula, modal function, sensitivity curve, and linear operating interval were obtained. The ZnO NW mass sensor was fabricated by a top-down method and its response to ethanol gas molecules was tested at room temperature. Experiments show that the sensor has high sensitivity, good closed-loop tracking performance, and high linearity, which provides great potential for the detection of biochemical reaction process of biological particles based on mechanics.

Citing Articles

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine.

Cai X, Wang Y, Cao Y, Yang W, Xia T, Li W Sensors (Basel). 2024; 24(11).

PMID: 38894417 PMC: 11175270. DOI: 10.3390/s24113625.

References

Lassagne B, Garcia-Sanchez D, Aguasca A, Bachtold A . Ultrasensitive mass sensing with a nanotube electromechanical resonator. Nano Lett. 2008; 8(11):3735-8. DOI: 10.1021/nl801982v. View

Li C, Duan S, Yi J, Wang C, Radjenovic P, Tian Z . Real-time detection of single-molecule reaction by plasmon-enhanced spectroscopy. Sci Adv. 2020; 6(24):eaba6012. PMC: 7286666. DOI: 10.1126/sciadv.aba6012. View

OConnell A, Hofheinz M, Ansmann M, Bialczak R, Lenander M, Lucero E . Quantum ground state and single-phonon control of a mechanical resonator. Nature. 2010; 464(7289):697-703. DOI: 10.1038/nature08967. View

Armani A, Kulkarni R, Fraser S, Flagan R, Vahala K . Label-free, single-molecule detection with optical microcavities. Science. 2007; 317(5839):783-7. DOI: 10.1126/science.1145002. View

Witkamp B, Poot M, van der Zant H . Bending-mode vibration of a suspended nanotube resonator. Nano Lett. 2006; 6(12):2904-8. DOI: 10.1021/nl062206p. View

Zhou L, Zhu L, Yang T, Hou X, Du Z, Cao S . Ultra-Stable and Durable Piezoelectric Nanogenerator with All-Weather Service Capability Based on N Doped 4H-SiC Nanohole Arrays. Nanomicro Lett. 2021; 14(1):30. PMC: 8669063. DOI: 10.1007/s40820-021-00779-0. View

Dulin D, Lipfert J, Charl Moolman M, Dekker N . Studying genomic processes at the single-molecule level: introducing the tools and applications. Nat Rev Genet. 2012; 14(1):9-22. DOI: 10.1038/nrg3316. View

Nazemi H, Joseph A, Park J, Emadi A . Advanced Micro- and Nano-Gas Sensor Technology: A Review. Sensors (Basel). 2019; 19(6). PMC: 6470538. DOI: 10.3390/s19061285. View

Sazonova V, Yaish Y, Ustunel H, Roundy D, Arias T, McEuen P . A tunable carbon nanotube electromechanical oscillator. Nature. 2004; 431(7006):284-7. DOI: 10.1038/nature02905. View

10.

Chaste J, Eichler A, Moser J, Ceballos G, Rurali R, Bachtold A . A nanomechanical mass sensor with yoctogram resolution. Nat Nanotechnol. 2012; 7(5):301-4. DOI: 10.1038/nnano.2012.42. View

11.

Li J, He G, Ueno H, Jia C, Noji H, Qi C . Direct real-time detection of single proteins using silicon nanowire-based electrical circuits. Nanoscale. 2016; 8(36):16172-16176. DOI: 10.1039/c6nr04103e. View

12.

Wang Y, Zhu L, Du C . Progress in Piezoelectric Nanogenerators Based on PVDF Composite Films. Micromachines (Basel). 2021; 12(11). PMC: 8624520. DOI: 10.3390/mi12111278. View

13.

Erdogan R, Alkhaled M, Kaynak B, Alhmoud H, Pisheh H, Kelleci M . Atmospheric Pressure Mass Spectrometry of Single Viruses and Nanoparticles by Nanoelectromechanical Systems. ACS Nano. 2022; 16(3):3821-3833. DOI: 10.1021/acsnano.1c08423. View

14.

Cai X, Xu L . A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature. Micromachines (Basel). 2022; 13(6). PMC: 9231396. DOI: 10.3390/mi13060952. View

15.

Kravets V, Schedin F, Jalil R, Britnell L, Gorbachev R, Ansell D . Singular phase nano-optics in plasmonic metamaterials for label-free single-molecule detection. Nat Mater. 2013; 12(4):304-9. DOI: 10.1038/nmat3537. View

16.

Zhu J, Liu X, Shi Q, He T, Sun Z, Guo X . Development Trends and Perspectives of Future Sensors and MEMS/NEMS. Micromachines (Basel). 2019; 11(1). PMC: 7019281. DOI: 10.3390/mi11010007. View

17.

Chiu H, Hung P, Postma H, Bockrath M . Atomic-scale mass sensing using carbon nanotube resonators. Nano Lett. 2008; 8(12):4342-6. DOI: 10.1021/nl802181c. View

18.

Zhu R, Wang D, Xiang S, Zhou Z, Ye X . Piezoelectric characterization of a single zinc oxide nanowire using a nanoelectromechanical oscillator. Nanotechnology. 2011; 19(28):285712. DOI: 10.1088/0957-4484/19/28/285712. View

19.

Sader J, Hanay M, Neumann A, Roukes M . Mass Spectrometry Using Nanomechanical Systems: Beyond the Point-Mass Approximation. Nano Lett. 2018; 18(3):1608-1614. DOI: 10.1021/acs.nanolett.7b04301. View

20.

Guha A, Ahmad O, Guerreiro A, Karim K, Sandstrom N, Ostanin V . Direct detection of small molecules using a nano-molecular imprinted polymer receptor and a quartz crystal resonator driven at a fixed frequency and amplitude. Biosens Bioelectron. 2020; 158:112176. DOI: 10.1016/j.bios.2020.112176. View