Micromachines
Overview
Micromachines is a peer-reviewed scientific journal that focuses on the research and development of micro- and nanoscale devices, systems, and applications. It covers a wide range of topics including fabrication techniques, materials, sensors, actuators, and microfluidics. With a multidisciplinary approach, the journal aims to advance the field of micromachines and foster innovation in various industries such as electronics, biomedical engineering, and robotics.
Details
Details
Abbr.
Micromachines (Basel)
Publisher
MDPI
Start
2010
End
Continuing
Frequency
Monthly, 2015-
e-ISSN
2072-666X
Country
Switzerland
Language
English
Metrics
Metrics
h-index / Ranks: 4506
78
SJR / Ranks: 8223
549
CiteScore / Ranks: 5521
4.70
JIF / Ranks: 2884
3.4
Recent Articles
1.
Liu J, Zhou S, Sui X
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047789
All-optical computing is an emerging information processing technology. As a cutting-edge technology in the field of photonics, it effectively leverages the unique advantages of photons to achieve rapid computation. However,...
2.
Lu Y, Qiu Z, Zhang S, Hu W, Qiu Y, Qiu Z
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047788
Coaxial rotor helicopters have a wide range of civilian and military applications; however, the collision risk of the upper and lower blades that comes with the coaxial rotor system remains....
3.
Mode Optimization of Microelectromechanical-System Traveling-Wave Ultrasonic Motor Based on Kirigami
Li R, Ran L, Wang C, He J, Zhou W
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047787
High-quality traveling waves in stators are critical for traveling-wave ultrasonic motors (TUSMs) to achieve good stability and efficiency. However, the modal splitting and shape distortion that is induced by the...
4.
Zhang Z, Tang F, Zhao Z, Zhang Z, Tang L
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047780
Quartz flexible accelerometers (QFAs) are a type of temperature-sensitive sensor, whereby a change in temperature will cause the key parameters of the accelerometer to drift and cause stability errors. Due...
5.
Yan R, Ji Y, Liu A, Wang L, Zhang S
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047723
With the development of technology, MEMS microphones, which are small-sized and highly uniform, have been applied extensively. To improve their reliability in extreme environment and overcome the constraints of traditional...
6.
Ye G, Yao Z
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047722
The chemical-mechanical polishing (CMP) of silicon wafers involves high-precision surface machining after double-sided lapping. Silicon wafers are subjected to chemical corrosion and mechanical removal under pressurized conditions. The multichip CMP...
7.
Xie W, Chen X, Zhang L, Lu X, Ding B, Xie A
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047721
The thermal through-silicon-via (TTSV) has a serious thermal stress problem due to the mismatch of the coefficient of thermal expansion between the Si substrate and filler metal. At present, the...
8.
Sun S, Ma F, He Y, Niu B, Wang C, Dai L, et al.
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047720
The piezoelectric grating voltage sensor has garnered significant attention in the realm of intelligent sensing, attributed to its compact size, cost-effectiveness, robust electromagnetic interference (EMI) immunity, and high network integration...
9.
Wang W, Zhang S, Cao H
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047719
In this work, a non-through metal-insulator-metal (MIM) waveguide capable of exciting three Fano resonances was designed and numerically studied using the finite element method. Fano resonances are achieved through the...
10.
Yan D, Huang H, Xue M, Duan N
Micromachines (Basel)
. 2025 Mar;
16(2).
PMID: 40047717
OH* generated through plasma catalysis offers several advantages, including a long survival time, high modification efficiency, and environmental friendliness. Consequently, a plasma-assisted polishing technology has rapidly developed. Previous studies exploring...