Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

Overview

Journal Micromachines (Basel)

Publisher MDPI

Date 2024 Aug 29

PMID 39203662

Authors

Chenguang Xin

Yingkun Xu

Zhongyao Zhang

Mengwei Li

Affiliations

Soon will be listed here.

Abstract

High-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS and discuss the challenges for future improvement.

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