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A Review of MEMS Capacitive Microphones

Overview
Journal Micromachines (Basel)
Publisher MDPI
Date 2020 May 14
PMID 32397340
Citations 23
Authors
Siti Aisyah Zawawi
Azrul Azlan Hamzah
Burhanuddin Yeop Majlis
Faisal Mohd-Yasin
Affiliations
Soon will be listed here.
Abstract

This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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