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Nanolithography. Large-scale Nanoshaping of Ultrasmooth 3D Crystalline Metallic Structures

Overview
Journal Science
Specialty Science
Date 2014 Dec 16
PMID 25504717
Citations 17
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Abstract

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

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