New Fabrication of High-frequency (100-MHz) Ultrasound PZT Film Kerfless Linear Array

Overview

Journal IEEE Trans Ultrason Ferroelectr Freq Control

Specialties Biomedical Engineering
Nuclear Medicine

Date 2013 Apr 4

PMID 23549547

Citations 11

Authors

Benpeng Zhu

Ngai Yui Chan

Jiyan Dai

K Kirk Shung

Shinichi Takeuchi

Qifa Zhou

Affiliations

Soon will be listed here.

Abstract

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.

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