Ravikiran Attota
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Explore the profile of Ravikiran Attota including associated specialties, affiliations and a list of published articles.
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7
Citations
38
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Recent Articles
1.
Attota R
J Biomed Opt
. 2018 Jul;
23(7):1-10.
PMID: 29981229
In recent years, the use of through-focus (TF) or volumetric type of optical imaging has gained momentum in several areas such as biological imaging, microscopy, adaptive optics, material processing, optical...
2.
Attota R, Kramar J
Proc SPIE Int Soc Opt Eng
. 2017 Jul;
9778.
PMID: 28663666
Through-focus scanning optical microscopy (TSOM) shows promise for patterned defect analysis, but it is important to minimize total system noise. TSOM is a three-dimensional shape metrology method that can achieve...
3.
Attota R
Opt Lett
. 2016 Feb;
41(4):745-8.
PMID: 26872178
A systematic noise-analysis study for optimizing data collection and data processing parameters for through-focus scanning optical microscopy (TSOM) is presented. TSOM is a three-dimensional shape metrology method that can achieve...
4.
Attota R, Silver R
Opt Express
. 2012 Mar;
20(6):6693-702.
PMID: 22418553
For high precision applications of optical microscopes, it is critical to achieve symmetrical angular illumination intensity at the sample plane, in addition to uniform spatial irradiance achieved by Köhler illumination....
5.
Attota R, Germer T, Silver R
Opt Lett
. 2008 Sep;
33(17):1990-2.
PMID: 18758588
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle,...
6.
Attota R, Silver R, Dixson R
Appl Opt
. 2008 Feb;
47(4):495-503.
PMID: 18239708
We present a detailed experimental study of a new through-focus technique to measure critical dimension linewidth with nanometer sensitivity using a bright field optical microscope. This method relies on analyzing...
7.
Silver R, Barnes B, Attota R, Jun J, Stocker M, Marx E, et al.
Appl Opt
. 2007 Jun;
46(20):4248-57.
PMID: 17579680
We have developed a set of techniques, referred to as scatterfield microscopy, in which the illumination is engineered in combination with appropriately designed metrology targets to extend the limits of...