Flexible Hybrid Integration Hall Angle Sensor Compatible with the CMOS Process

Overview

Journal Sensors (Basel)

Publisher MDPI

Specialty Biotechnology

Date 2025 Feb 13

PMID 39943565

Authors

Ye Luo

Youtong Fang

Yang Lv

Huaxiong Zheng

Ke Guan

Affiliations

Soon will be listed here.

Abstract

Silicon-based Hall application-specific integrated circuit (ASIC) chips have become very successful, making them ideal for flexible electronic and sensor devices. In this study, we designed, simulated, and tested flexible hybrid integration angle sensors that can be made using complementary metal-oxide-semiconductor (CMOS) technology. These sensors are manufactured on a 100 µm-thick flexible polyimide (PI) membrane, which is suitable for large-scale production and has strong potential for industrial use. The Hall sensors have a sensitivity of 0.205 V/mT. Importantly, their sensitivity remains stable even after being bent to a minimum radius of 10 mm and after undergoing 100 bending cycles. The experiment shows that these flexible hybrid integration devices are promising as angle sensors.

References

Yuan Y, Giri G, Ayzner A, Zoombelt A, Mannsfeld S, Chen J . Ultra-high mobility transparent organic thin film transistors grown by an off-centre spin-coating method. Nat Commun. 2014; 5:3005. DOI: 10.1038/ncomms4005. View

Yang H, Li S, Wu Y, Bao X, Xiang Z, Xie Y . Advances in Flexible Magnetosensitive Materials and Devices for Wearable Electronics. Adv Mater. 2024; 36(37):e2311996. DOI: 10.1002/adma.202311996. View

Riem R, Raman J, Rombouts P . A 2 MS/s Full Bandwidth Hall System with Low Offset Enabled by Randomized Spinning. Sensors (Basel). 2022; 22(16). PMC: 9416114. DOI: 10.3390/s22166069. View

Donolato M, Tollan C, Porro J, Berger A, Vavassori P . Flexible and stretchable polymers with embedded magnetic nanostructures. Adv Mater. 2012; 25(4):623-9. DOI: 10.1002/adma.201203072. View

Hong W, Guo X, Zhang T, Mu S, Wu F, Yan Z . Flexible Strain Sensor Based on Nickel Microparticles/Carbon Black Microspheres/Polydimethylsiloxane Conductive Composites for Human Motion Detection. ACS Appl Mater Interfaces. 2024; 16(25):32702-32712. DOI: 10.1021/acsami.4c04830. View

Zang Y, Zhang F, Huang D, Di C, Zhu D . Sensitive Flexible Magnetic Sensors using Organic Transistors with Magnetic-Functionalized Suspended Gate Electrodes. Adv Mater. 2015; 27(48):7979-85. DOI: 10.1002/adma.201503542. View

Wang Z, Wang X, Li M, Gao Y, Hu Z, Nan T . Highly Sensitive Flexible Magnetic Sensor Based on Anisotropic Magnetoresistance Effect. Adv Mater. 2016; 28(42):9370-9377. DOI: 10.1002/adma.201602910. View

Luo Y, Sun C, Ma H, Wei M, Li J, Jian J . Flexible passive integrated photonic devices with superior optical and mechanical performance. Opt Express. 2022; 30(15):26534-26543. DOI: 10.1364/OE.464896. View

Gutruf P, Yin R, Lee K, Ausra J, Brennan J, Qiao Y . Wireless, battery-free, fully implantable multimodal and multisite pacemakers for applications in small animal models. Nat Commun. 2019; 10(1):5742. PMC: 6917818. DOI: 10.1038/s41467-019-13637-w. View

10.

Luo Y, Sun C, Wei M, Ma H, Wu Y, Chen Z . Integrated Flexible Microscale Mechanical Sensors Based on Cascaded Free Spectral Range-Free Cavities. Nano Lett. 2023; 23(19):8898-8906. DOI: 10.1021/acs.nanolett.3c02239. View

11.

Ji D, Zhu Y, Li M, Fan X, Zhang T, Li Y . Skin Comfort Sensation with Mechanical Stimulus from Electronic Skin. Materials (Basel). 2024; 17(12). PMC: 11204911. DOI: 10.3390/ma17122920. View

12.

Oh J, Lee Y, Lee T . Skin-Mountable Functional Electronic Materials for Bio-Integrated Devices. Adv Healthc Mater. 2024; 13(24):e2303797. DOI: 10.1002/adhm.202303797. View

13.

Lee H, Kim M, Kim I, Lee H . Flexible and Stretchable Optoelectronic Devices using Silver Nanowires and Graphene. Adv Mater. 2016; 28(22):4541-8. DOI: 10.1002/adma.201505559. View

14.

Jang H, Park Y, Chen X, Das T, Kim M, Ahn J . Graphene-Based Flexible and Stretchable Electronics. Adv Mater. 2016; 28(22):4184-202. DOI: 10.1002/adma.201504245. View

15.

Wang Y, Guo H, Harbuzaru A, Uddin M, Arrechea-Marcos I, Ling S . (Semi)ladder-Type Bithiophene Imide-Based All-Acceptor Semiconductors: Synthesis, Structure-Property Correlations, and Unipolar n-Type Transistor Performance. J Am Chem Soc. 2018; 140(19):6095-6108. DOI: 10.1021/jacs.8b02144. View

16.

Han S, Kim J, Won S, Ma Y, Kang D, Xie Z . Battery-free, wireless sensors for full-body pressure and temperature mapping. Sci Transl Med. 2018; 10(435). PMC: 5996377. DOI: 10.1126/scitranslmed.aan4950. View

17.

Wang Y, Hasegawa T, Matsumoto H, Michinobu T . Correction to "Significant Improvement of Unipolar n-Type Transistor Performances by Manipulating the Coplanar Backbone Conformation of Electron-Deficient Polymers via Hydrogen Bonding". J Am Chem Soc. 2021; 143(50):21443. DOI: 10.1021/jacs.1c12391. View

18.

Wang Z, Shaygan M, Otto M, Schall D, Neumaier D . Flexible Hall sensors based on graphene. Nanoscale. 2016; 8(14):7683-7. DOI: 10.1039/c5nr08729e. View

19.

Karnaushenko D, Makarov D, Stober M, Karnaushenko D, Baunack S, Schmidt O . High-performance magnetic sensorics for printable and flexible electronics. Adv Mater. 2014; 27(5):880-5. PMC: 4365733. DOI: 10.1002/adma.201403907. View