Wafer-Scale Fabrication of Wearable All-Carbon Nanotube Photodetector Arrays

Overview

Journal ACS Nano

Publisher American Chemical Society

Specialty Biotechnology

Date 2024 Jul 12

PMID 38997111

Authors

Peng Liu

Er-Xiong Ding

Zhenyu Xu

Xiaoqi Cui

Mingde Du

Weijun Zeng

Anastasios Karakassides

Jin Zhang

Qiang Zhang

Faisal Ahmed

Hua Jiang

Pertti Hakonen

Harri Lipsanen

Zhipei Sun

Esko I Kauppinen

Affiliations

Soon will be listed here.

Abstract

With electronic devices evolving toward portable and high-performance wearables, the constraints of complex and wet processing technologies become apparent. This study presents a scalable photolithography/chemical-free method for crafting wearable all-carbon nanotube (CNT) photodetector device arrays. Laser-assisted patterning and dry deposition techniques directly assemble gas-phase CNTs into flexible devices without any lithography or lift-off processes. The resulting wafer-scale all-CNT photodetector arrays showcase excellent uniformity, wearability, environmental stability, and notable broadband photoresponse, boasting a high responsivity of 44 AW and a simultaneous detectivity of 1.9 × 10 Jones. This research provides an efficient, versatile, and scalable strategy for manufacturing wearable all-CNT device arrays, allowing widespread adoption in wearable optoelectronics and multifunctional sensors.

References

Yang F, Wang M, Zhang D, Yang J, Zheng M, Li Y . Chirality Pure Carbon Nanotubes: Growth, Sorting, and Characterization. Chem Rev. 2020; 120(5):2693-2758. DOI: 10.1021/acs.chemrev.9b00835. View

Jiang W, Lee S, Zhao K, Lee K, Han H, Oh J . Flexible and Transparent Electrode of Hybrid TiCT MXene-Silver Nanowires for High-Performance Quantum Dot Light-Emitting Diodes. ACS Nano. 2022; 16(6):9203-9213. DOI: 10.1021/acsnano.2c01514. View

Liu Y, Guo J, Zhu E, Liao L, Lee S, Ding M . Approaching the Schottky-Mott limit in van der Waals metal-semiconductor junctions. Nature. 2018; 557(7707):696-700. DOI: 10.1038/s41586-018-0129-8. View

Qu T, Sun Y, Chen M, Liu Z, Zhu Q, Wang B . A Flexible Carbon Nanotube Sen-Memory Device. Adv Mater. 2020; 32(9):e1907288. DOI: 10.1002/adma.201907288. View

Lu S, Cardenas J, Worsley R, Williams N, Andrews J, Casiraghi C . Flexible, Print-in-Place 1D-2D Thin-Film Transistors Using Aerosol Jet Printing. ACS Nano. 2019; 13(10):11263-11272. DOI: 10.1021/acsnano.9b04337. View

Kamada M, Laitinen A, Zeng W, Will M, Sarkar J, Tappura K . Electrical Low-Frequency 1/ Noise Due to Surface Diffusion of Scatterers on an Ultra-low-Noise Graphene Platform. Nano Lett. 2021; 21(18):7637-7643. PMC: 8461652. DOI: 10.1021/acs.nanolett.1c02325. View

Wang Y, Liu D, Zhang H, Wang J, Du R, Li T . Methylation-Induced Reversible Metallic-Semiconducting Transition of Single-Walled Carbon Nanotube Arrays for High-Performance Field-Effect Transistors. Nano Lett. 2019; 20(1):496-501. DOI: 10.1021/acs.nanolett.9b04219. View

Yoon H, Ahmed F, Dai Y, Fernandez H, Cui X, Bai X . Tunable Quantum Tunneling through a Graphene/BiSe Heterointerface for the Hybrid Photodetection Mechanism. ACS Appl Mater Interfaces. 2021; 13(49):58927-58935. PMC: 8678989. DOI: 10.1021/acsami.1c18606. View

Park S, Kim S, Nam J, Pitner G, Lee T, Ayzner A . Significant enhancement of infrared photodetector sensitivity using a semiconducting single-walled carbon nanotube/C60 phototransistor. Adv Mater. 2015; 27(4):759-65. DOI: 10.1002/adma.201404544. View

10.

Miao Z, Tan H, Gustavsson L, Zhou Y, Xu Q, Ikkala O . Gustation-Inspired Dual-Responsive Hydrogels for Taste Sensing Enabled by Machine Learning. Small. 2023; 20(7):e2305195. DOI: 10.1002/smll.202305195. View

11.

Zhang Z, Li L, Horng J, Wang N, Yang F, Yu Y . Strain-Modulated Bandgap and Piezo-Resistive Effect in Black Phosphorus Field-Effect Transistors. Nano Lett. 2017; 17(10):6097-6103. DOI: 10.1021/acs.nanolett.7b02624. View

12.

Zou Y, Li Q, Liu J, Jin Y, Qian Q, Jiang K . Fabrication of all-carbon nanotube electronic devices on flexible substrates through CVD and transfer methods. Adv Mater. 2013; 25(42):6050-6. DOI: 10.1002/adma.201302265. View

13.

Laiho P, Mustonen K, Ohno Y, Maruyama S, Kauppinen E . Dry and Direct Deposition of Aerosol-Synthesized Single-Walled Carbon Nanotubes by Thermophoresis. ACS Appl Mater Interfaces. 2017; 9(24):20738-20747. DOI: 10.1021/acsami.7b03151. View

14.

Liu J, Shabbir B, Wang C, Wan T, Ou Q, Yu P . Flexible, Printable Soft-X-Ray Detectors Based on All-Inorganic Perovskite Quantum Dots. Adv Mater. 2019; 31(30):e1901644. DOI: 10.1002/adma.201901644. View

15.

Liu L, Han J, Xu L, Zhou J, Zhao C, Ding S . Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics. Science. 2020; 368(6493):850-856. DOI: 10.1126/science.aba5980. View

16.

Liu Y, Wang F, Wang X, Wang X, Flahaut E, Liu X . Planar carbon nanotube-graphene hybrid films for high-performance broadband photodetectors. Nat Commun. 2015; 6:8589. PMC: 4633958. DOI: 10.1038/ncomms9589. View

17.

Lu R, Christianson C, Kirkeminde A, Ren S, Wu J . Extraordinary photocurrent harvesting at type-II heterojunction interfaces: toward high detectivity carbon nanotube infrared detectors. Nano Lett. 2012; 12(12):6244-9. DOI: 10.1021/nl303302p. View

18.

Che Y, Wang C, Liu J, Liu B, Lin X, Parker J . Selective synthesis and device applications of semiconducting single-walled carbon nanotubes using isopropyl alcohol as feedstock. ACS Nano. 2012; 6(8):7454-62. DOI: 10.1021/nn302720n. View

19.

Sun D, Liu C, Ren W, Cheng H . A review of carbon nanotube- and graphene-based flexible thin-film transistors. Small. 2013; 9(8):1188-205. DOI: 10.1002/smll.201203154. View

20.

Wang F, Zhang T, Xie R, Wang Z, Hu W . How to characterize figures of merit of two-dimensional photodetectors. Nat Commun. 2023; 14(1):2224. PMC: 10115793. DOI: 10.1038/s41467-023-37635-1. View