Free Light-shape Focusing in Extreme-ultraviolet Radiation with Self-evolutionary Photon Sieves

Overview

Journal Sci Rep

Specialty Science

Date 2024 Jan 19

PMID 38243046

Authors

Huaiyu Cui

Xiuping Zhang

You Li

Dongdi Zhao

Junyong Zhang

Yongpeng Zhao

Affiliations

Soon will be listed here.

Abstract

Extreme-ultraviolet (EUV) radiation is a promising tool, not only for probing microscopic activities but also for processing nanoscale structures and performing high-resolution imaging. In this study, we demonstrate an innovative method to generate free light-shape focusing with self-evolutionary photon sieves under a single-shot coherent EUV laser; this includes vortex focus shaping, array focusing, and structured-light shaping. The results demonstrate that self-evolutionary photon sieves, consisting of a large number of specific pinholes fabricated on a piece of SiN membrane, are capable of freely regulating an EUV light field, for which high-performance focusing elements are extremely lacking, let alone free light-shape focusing. Our proposed versatile photon sieves are a key breakthrough in focusing technology in the EUV region and pave the way for high-resolution soft X-ray microscopy, spectroscopy in materials science, shorter lithography, and attosecond metrology in next-generation synchrotron radiation and free-electron lasers.

Citing Articles

Vortex bifocusing of extreme ultraviolet using modified Fermat-spiral photon-sieve splitter.

Liu Y, Cui H, Shen Y, Zhao Y, Yang S, Wang G Nanophotonics. 2024; 13(23):4225-4230.

PMID: 39678114 PMC: 11636271. DOI: 10.1515/nanoph-2024-0389.

References

Kuznetsov I, Filevich J, Dong F, Woolston M, Chao W, Anderson E . Three-dimensional nanoscale molecular imaging by extreme ultraviolet laser ablation mass spectrometry. Nat Commun. 2015; 6:6944. PMC: 4423227. DOI: 10.1038/ncomms7944. View

Pfeifer M, Williams G, Vartanyants I, Harder R, Robinson I . Three-dimensional mapping of a deformation field inside a nanocrystal. Nature. 2006; 442(7098):63-6. DOI: 10.1038/nature04867. View

ROCCA , Shlyaptsev V , Tomasel , Cortazar , Hartshorn , Chilla . Demonstration of a discharge pumped table-top soft-x-ray laser. Phys Rev Lett. 1994; 73(16):2192-2195. DOI: 10.1103/PhysRevLett.73.2192. View

Kipp L, Skibowski M, Johnson R, Berndt R, Adelung R, Harm S . Sharper images by focusing soft X-rays with photon sieves. Nature. 2001; 414(6860):184-8. DOI: 10.1038/35102526. View

LHUILLIER , Balcou . High-order harmonic generation in rare gases with a 1-ps 1053-nm laser. Phys Rev Lett. 1993; 70(6):774-777. DOI: 10.1103/PhysRevLett.70.774. View

Katoch S, Chauhan S, Kumar V . A review on genetic algorithm: past, present, and future. Multimed Tools Appl. 2020; 80(5):8091-8126. PMC: 7599983. DOI: 10.1007/s11042-020-10139-6. View

Ossiander M, Meretska M, Hampel H, Lim S, Knefz N, Jauk T . Extreme ultraviolet metalens by vacuum guiding. Science. 2023; 380(6640):59-63. DOI: 10.1126/science.adg6881. View

Zhang J . Three-dimensional array diffraction-limited foci from Greek ladders to generalized Fibonacci sequences. Opt Express. 2015; 23(23):30308-17. DOI: 10.1364/OE.23.030308. View

Schultze M, Ramasesha K, Pemmaraju C, Sato S, Whitmore D, Gandman A . Ultrafast dynamics. Attosecond band-gap dynamics in silicon. Science. 2014; 346(6215):1348-52. DOI: 10.1126/science.1260311. View

10.

Zhao Y, Jiang S, Xie Y, Yang D, Teng S, Chen D . Demonstration of soft x-ray laser of Ne-like Ar at 69.8 nm pumped by capillary discharge. Opt Lett. 2011; 36(17):3458-60. DOI: 10.1364/OL.36.003458. View

11.

Soltau J, Osterhoff M, Salditt T . Coherent Diffractive Imaging with Diffractive Optics. Phys Rev Lett. 2022; 128(22):223901. DOI: 10.1103/PhysRevLett.128.223901. View

12.

Rupp D, Monserud N, Langbehn B, Sauppe M, Zimmermann J, Ovcharenko Y . Publisher Correction: Coherent diffractive imaging of single helium nanodroplets with a high harmonic generation source. Nat Commun. 2018; 9(1):302. PMC: 5768786. DOI: 10.1038/s41467-017-02702-x. View

13.

Jopson R, Darack S, Freeman R, Bokor J . Laser-plasma-induced extreme-ultraviolet radiation from liquid mercury. Opt Lett. 2009; 8(5):265-7. DOI: 10.1364/ol.8.000265. View

14.

Zhao Y, Liu T, Zhang W, Li W, Cui H . Demonstration of gain saturation and double-pass amplification of a 69.8 nm laser pumped by capillary discharge. Opt Lett. 2016; 41(16):3779-82. DOI: 10.1364/OL.41.003779. View

15.

Tadesse G, Eschen W, Klas R, Tschernajew M, Tuitje F, Steinert M . Wavelength-scale ptychographic coherent diffractive imaging using a high-order harmonic source. Sci Rep. 2019; 9(1):1735. PMC: 6370773. DOI: 10.1038/s41598-019-38501-1. View

16.

Elson J, Rahn J, Bennett J . Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties. Appl Opt. 1983; 22(20):3207. DOI: 10.1364/ao.22.003207. View

17.

Zhang Z, Li W, Huang Q, Zhang Z, Yi S, Pan L . A table-top EUV focusing optical system with high energy density using a modified Schwarzschild objective and a laser-plasma light source. Rev Sci Instrum. 2018; 89(10):103109. DOI: 10.1063/1.5044752. View

18.

Gasper G, Takahashi L, Zhou J, Ahmed M, Moore J, Hanley L . Comparing Vacuum and Extreme Ultraviolet Radiation for Postionization of Laser Desorbed Neutrals from Bacterial Biofilms and Organic Fullerenes. Nucl Instrum Methods Phys Res A. 2011; 649(1):222-224. PMC: 3150573. DOI: 10.1016/j.nima.2010.12.024. View

19.

Baksh P, Odstrcil M, Kim H, Boden S, Frey J, Brocklesby W . Wide-field broadband extreme ultraviolet transmission ptychography using a high-harmonic source. Opt Lett. 2016; 41(7):1317-20. DOI: 10.1364/OL.41.001317. View

20.

Jefferies S, Lloyd-Hart M, Hege E, Georges J . Sensing wave-front amplitude and phase with phase diversity. Appl Opt. 2002; 41(11):2095-102. DOI: 10.1364/ao.41.002095. View