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Enhancing Subthreshold Slope and ON-current in a Simple ITFET with Overlapping Gate on Source-contact, Drain Schottky Contact, and Intrinsic SiGe-pocket

Overview
Journal Discov Nano
Date 2023 Sep 29
PMID 37773549
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Abstract

In this paper, we present a new novel simple iTFET with overlapping gate on source-contact (SGO), Drain Schottky Contact, and intrinsic SiGe pocket (Pocket-SGO iTFET). The aim is to achieve steep subthreshold swing (S.S) and high I current. By optimizing the gate and source-contact overlap, the tunneling efficiency is significantly enhanced, while the ambipolar effect is suppressed. Additionally, using a Schottky contact at the drain/source, instead of ion implantation drain/source, reduces leakage current and thermal budget. Moreover, the tunneling region is replaced by an intrinsic SiGe pocket posing a narrower bandgap, which increases the probability of band-to-band tunneling and enhances the I current. Our simulations are based on the feasibility of the actual process, thorough Sentaurus TCAD simulations demonstrate that the Pocket-SGO iTFET exhibits an average and minimum subthreshold swing of S.S = 16.2 mV/Dec and S.S = 4.62 mV/Dec, respectively. At V = 0.2 V, the I current is 1.81 [Formula: see text] 10 A/μm, and the I/I ratio is 1.34 [Formula: see text] 10. The Pocket-SGO iTFET design shows great potential for ultra-low-power devices that are required for the Internet of Things (IoT) and AI applications.

Citing Articles

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Lin J, Tai W Discov Nano. 2024; 19(1):140.

PMID: 39227488 PMC: 11371965. DOI: 10.1186/s11671-024-04096-4.

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