CMUT Technology Developments

Overview

Journal Z Med Phys

Specialty Radiology

Date 2023 Jun 14

PMID 37316428

Authors

Carl D Herickhoff

Rob van Schaijk

Affiliations

Soon will be listed here.

Abstract

Capacitive micromachined ultrasonic transducer (cMUT) technology has steadily advanced since its advent in the mid-1990's. Though cMUTs have not supplanted piezoelectric transducers for medical ultrasound imaging to date, researchers and engineers are continuing to improve cMUTs and leverage unique cMUT characteristics toward new applications. While not intended to be an exhaustive review of every aspect of cMUT state-of-the-art, this article provides a brief overview of cMUT benefits, challenges, and opportunities, as well as recent progress in cMUT research and translation.

Citing Articles

Radiation Impedance of Rectangular CMUTs.

Khorassany S, Dew E, Rahim Sobhani M, Zemp R Sensors (Basel). 2024; 24(17).

PMID: 39275732 PMC: 11398137. DOI: 10.3390/s24175823.

Therapeutic ultrasound transducer technology and monitoring techniques: a review with clinical examples.

Lafond M, Payne A, Lafon C Int J Hyperthermia. 2024; 41(1):2389288.

PMID: 39134055 PMC: 11375802. DOI: 10.1080/02656736.2024.2389288.

CMUT as a Transmitter for Microbubble-Assisted Blood-Brain Barrier Opening.

Kilinc M, Pakdaman Zangabad R, Arvanitis C, Degertekin F IEEE Trans Ultrason Ferroelectr Freq Control. 2024; 71(8):1042-1050.

PMID: 38905098 PMC: 11403385. DOI: 10.1109/TUFFC.2024.3417818.

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging.

Yu C, Wu S, Zhong Y, Xu R, Yu T, Zhao J Sensors (Basel). 2024; 24(1).

PMID: 38203033 PMC: 10781294. DOI: 10.3390/s24010171.

References

Greenlay B, Zemp R . Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process. IEEE Trans Ultrason Ferroelectr Freq Control. 2017; 64(1):93-107. DOI: 10.1109/TUFFC.2016.2620425. View

Feinstein S, Coll B, Staub D, Adam D, Schinkel A, Ten Cate F . Contrast enhanced ultrasound imaging. J Nucl Cardiol. 2009; 17(1):106-15. DOI: 10.1007/s12350-009-9165-y. View

Satir S, Zahorian J, Degertekin F . A large-signal model for CMUT arrays with arbitrary membrane geometry operating in non-collapsed mode. IEEE Trans Ultrason Ferroelectr Freq Control. 2013; 60(11):2426-39. PMC: 4029428. DOI: 10.1109/TUFFC.2013.6644745. View

Ferrara K, Pollard R, Borden M . Ultrasound microbubble contrast agents: fundamentals and application to gene and drug delivery. Annu Rev Biomed Eng. 2007; 9:415-47. DOI: 10.1146/annurev.bioeng.8.061505.095852. View

Bayram B, Yaralioglu G, Kupnik M, Ergun A, Oralkan O, Nikoozadeh A . Dynamic analysis of capacitive micromachined ultrasonic transducers. IEEE Trans Ultrason Ferroelectr Freq Control. 2006; 52(12):2270-5. DOI: 10.1109/tuffc.2005.1563269. View

Yu Y, Pun S, Un Mak P, Cheng C, Wang J, Mak P . Design of a Collapse-Mode CMUT With an Embossed Membrane for Improving Output Pressure. IEEE Trans Ultrason Ferroelectr Freq Control. 2016; 63(6):854-63. DOI: 10.1109/TUFFC.2016.2554612. View

Rothberg J, Ralston T, Rothberg A, Martin J, Zahorian J, Alie S . Ultrasound-on-chip platform for medical imaging, analysis, and collective intelligence. Proc Natl Acad Sci U S A. 2021; 118(27). PMC: 8271708. DOI: 10.1073/pnas.2019339118. View

Logan A, Yeow J . Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-based wafer bonding process. IEEE Trans Ultrason Ferroelectr Freq Control. 2009; 56(5):1074-84. DOI: 10.1109/TUFFC.2009.1141. View

Arkan E, Degertekin F . Analysis and Design of High-Frequency 1-D CMUT Imaging Arrays in Noncollapsed Mode. IEEE Trans Ultrason Ferroelectr Freq Control. 2018; 66(2):382-393. PMC: 6415772. DOI: 10.1109/TUFFC.2018.2887043. View

10.

Chee R, Zhang P, Maadi M, Zemp R . Multifrequency Interlaced CMUTs for Photoacoustic Imaging. IEEE Trans Ultrason Ferroelectr Freq Control. 2017; 64(2):391-401. DOI: 10.1109/TUFFC.2016.2620381. View

11.

Maadi M, Ceroici C, Zemp R . Dual-Frequency CMUT Arrays for Multiband Ultrasound Imaging Applications. IEEE Trans Ultrason Ferroelectr Freq Control. 2021; 68(7):2532-2542. DOI: 10.1109/TUFFC.2021.3062071. View

12.

Brenner K, Ergun A, Firouzi K, Rasmussen M, Stedman Q, Khuri-Yakub B . Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines (Basel). 2019; 10(2). PMC: 6412242. DOI: 10.3390/mi10020152. View

13.

Maadi M, Zemp R . Self and Mutual Radiation Impedances for Modeling of Multi-Frequency CMUT Arrays. IEEE Trans Ultrason Ferroelectr Freq Control. 2016; 63(9):1441-1454. DOI: 10.1109/TUFFC.2016.2587868. View

14.

Chee R, Zemp R . Feasibility of modulation-encoded TOBE CMUTS for real-time 3-D imaging. IEEE Trans Ultrason Ferroelectr Freq Control. 2015; 62(4):771-5. DOI: 10.1109/TUFFC.2014.006681. View

15.

Bayram B, Oralkan O, Ergun A, Haeggstrom E, Yaralioglu G, Khuri-Yakub B . Capacitive micromachined ultrasonic transducer design for high power transmission. IEEE Trans Ultrason Ferroelectr Freq Control. 2005; 52(2):326-39. DOI: 10.1109/tuffc.2005.1406558. View

16.

Ilkhechi A, Ceroici C, Li Z, Zemp R . Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications. Opt Express. 2020; 28(9):13750-13760. DOI: 10.1364/OE.390612. View

17.

Joseph J, Ma B, Khuri-Yakub B . Applications of Capacitive Micromachined Ultrasonic Transducers: A Comprehensive Review. IEEE Trans Ultrason Ferroelectr Freq Control. 2021; 69(2):456-467. DOI: 10.1109/TUFFC.2021.3112917. View

18.

Oralkan O, Bayram B, Yaralioglu G, Ergun A, Kupnik M, Yeh D . Experimental characterization of collapse-mode CMUT operation. IEEE Trans Ultrason Ferroelectr Freq Control. 2006; 53(8):1513-23. DOI: 10.1109/tuffc.2006.1665109. View

19.

Beard P . Biomedical photoacoustic imaging. Interface Focus. 2012; 1(4):602-31. PMC: 3262268. DOI: 10.1098/rsfs.2011.0028. View

20.

Wong L, Chen A, Li Z, Logan A, Yeow J . A row-column addressed micromachined ultrasonic transducer array for surface scanning applications. Ultrasonics. 2014; 54(8):2072-80. DOI: 10.1016/j.ultras.2014.07.002. View