Near-UV Light Emitting Diode with On-chip Photocatalysts for Purification Applications

A new design for light-emitting diodes (LEDs) with on-chip photocatalysts is presented for purification applications. An array of disk-shaped TiO, with a diameter of several hundred nanometers, combined with SiO pedestals was fabricated directly on the surface of an InGaN-based near-ultraviolet (UV) LED using a dry etching process. The high refractive-index contrast at the boundary and the circular shape can effectively confine the near-UV light generated from the LED through multiple internal reflections inside the TiO nanodisks. Such a feature results in the enhancement of light absorption by the photocatalytic TiO. The degradation of the organic dye malachite green was monitored as a model photocatalytic reaction. The proposed structure of LEDs with TiO/SiO nanodisk/pedestal array exhibited a photocatalytic activity that was three times higher than the activity of LEDs with a TiO planar layer. The integration of photocatalytic materials with near-UV LEDs in a single system is promising for various purification applications, such as sterilization and disinfection.