Sensitive Capacitive Pressure Sensors Based on Graphene Membrane Arrays

Overview

Journal Microsyst Nanoeng

Date 2021 Sep 27

PMID 34567711

Citations 12

Authors

Makars Siskins

Martin Lee

Dominique Wehenkel

Richard van Rijn

Tijmen W de Jong

Johannes R Renshof

Berend C Hopman

Willemijn S J M Peters

Dejan Davidovikj

Herre S J van der Zant

Peter G Steeneken

Affiliations

Soon will be listed here.

Abstract

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors, the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small-diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature annealing. These sensors are readout using a low-cost battery-powered circuit board, with a responsivity of up to aF Pa mm, thereby outperforming the commercial sensors.

Citing Articles

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High-Yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor Applications.

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