Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System

Overview

Journal Sensors (Basel)

Publisher MDPI

Specialty Biotechnology

Date 2021 Jun 2

PMID 34063656

Authors

Gabriel Jobert

Pierre Barritault

Maryse Fournier

Cyrielle Monpeurt

Salim Boutami

Cecile Jamois

Pietro Bernasconi

Andrea Lovera

Daniele Braga

Christian Seassal

Affiliations

Soon will be listed here.

Abstract

Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration.

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