Design and Experimentation of a Self-Sensing Actuator for Active Vibration Isolation System with Adjustable Anti-Resonance Frequency Controller

The vibration isolation system is now indispensable to high-precision instruments and equipment, which can provide a low vibration environment to ensure performance. However, the disturbance with variable frequency poses a challenge to the vibration isolation system, resulting in precision reduction of dynamic modeling. This paper presents a velocity self-sensing method and experimental verification of a vibration isolation system. A self-sensing actuator is designed to isolate the vibration with varying frequencies according to the dynamic vibration absorber structure. The mechanical structure of the actuator is illustrated, and the dynamic model is derived. Then a self-sensing method is proposed to adjust the anti-resonance frequency of the system without velocity sensors, which can also reduce the complexity of the system and prevent the disturbance transmitting along the cables. The self-sensing controller is constructed to track the variable frequency of the disturbance. A prototype of the isolation system equipped with velocity sensors is developed for the experiment. The experiment results show that the closed-loop transmissibility is less than -5 dB in the whole frequency rand and is less than -40 dB around, adding anti-resonance frequency which can be adjusted from 0 Hz to initial anti-resonance frequency. The disturbance amplitude of the payload can be suppressed to 10%.