MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever

Overview

Journal Sensors (Basel)

Publisher MDPI

Specialty Biotechnology

Date 2020 Feb 21

PMID 32075243

Citations 9

Authors

Thanh-Vinh Nguyen

Yuya Mizuki

Takuya Tsukagoshi

Tomoyuki Takahata

Masaaki Ichiki

Isao Shimoyama

Affiliations

Soon will be listed here.

Abstract

This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement.

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References

Boutry C, Nguyen A, Lawal Q, Chortos A, Rondeau-Gagne S, Bao Z . A Sensitive and Biodegradable Pressure Sensor Array for Cardiovascular Monitoring. Adv Mater. 2015; 27(43):6954-61. DOI: 10.1002/adma.201502535. View

Kim E, Park C, Park J, Suh S, Choi C, Kim J . Relationship between blood pressure parameters and pulse wave velocity in normotensive and hypertensive subjects: invasive study. J Hum Hypertens. 2006; 21(2):141-8. DOI: 10.1038/sj.jhh.1002120. View

Shcherbina A, Mattsson C, Waggott D, Salisbury H, Christle J, Hastie T . Accuracy in Wrist-Worn, Sensor-Based Measurements of Heart Rate and Energy Expenditure in a Diverse Cohort. J Pers Med. 2017; 7(2). PMC: 5491979. DOI: 10.3390/jpm7020003. View

Mannsfeld S, Tee B, Stoltenberg R, Chen C, Barman S, Muir B . Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers. Nat Mater. 2010; 9(10):859-64. DOI: 10.1038/nmat2834. View

Parikh J, Hollingsworth K, Kunadian V, Blamire A, MacGowan G . Measurement of pulse wave velocity in normal ageing: comparison of Vicorder and magnetic resonance phase contrast imaging. BMC Cardiovasc Disord. 2016; 16:50. PMC: 4759948. DOI: 10.1186/s12872-016-0224-4. View

Parkes M, Green S, Stevens A, Clutton-Brock T . Assessing and ensuring patient safety during breath-holding for radiotherapy. Br J Radiol. 2014; 87(1043):20140454. PMC: 4207152. DOI: 10.1259/bjr.20140454. View

Nguyen T, Tsukagoshi T, Takahashi H, Matsumoto K, Shimoyama I . Depinning-Induced Capillary Wave during the Sliding of a Droplet on a Textured Surface. Langmuir. 2016; 32(37):9523-9. DOI: 10.1021/acs.langmuir.6b02762. View

Liu X, Gao H, Li B, Cheng M, Ma Y, Zhang Z . Pulse wave velocity as a marker of arteriosclerosis and its comorbidities in Chinese patients. Hypertens Res. 2007; 30(3):237-42. DOI: 10.1291/hypres.30.237. View

Gaddum N, Schaeffter T, Buhrer M, Rutten M, Smith L, Chowienczyk P . Beat-to-beat variation in pulse wave velocity during breathing maneuvers. Magn Reson Med. 2013; 72(1):202-10. DOI: 10.1002/mrm.24890. View

10.

Kaisti M, Panula T, Leppanen J, Punkkinen R, Jafari Tadi M, Vasankari T . Clinical assessment of a non-invasive wearable MEMS pressure sensor array for monitoring of arterial pulse waveform, heart rate and detection of atrial fibrillation. NPJ Digit Med. 2019; 2:39. PMC: 6550190. DOI: 10.1038/s41746-019-0117-x. View

11.

Ma Y, Choi J, Hourlier-Fargette A, Xue Y, Chung H, Lee J . Relation between blood pressure and pulse wave velocity for human arteries. Proc Natl Acad Sci U S A. 2018; 115(44):11144-11149. PMC: 6217416. DOI: 10.1073/pnas.1814392115. View

12.

Bickler P, Feiner J, Severinghaus J . Effects of skin pigmentation on pulse oximeter accuracy at low saturation. Anesthesiology. 2005; 102(4):715-9. DOI: 10.1097/00000542-200504000-00004. View

13.

Rachim V, Chung W . Multimodal Wrist Biosensor for Wearable Cuff-less Blood Pressure Monitoring System. Sci Rep. 2019; 9(1):7947. PMC: 6538603. DOI: 10.1038/s41598-019-44348-3. View

14.

Nguyen T, Nguyen M, Takahashi H, Matsumoto K, Shimoyama I . Viscosity measurement based on the tapping-induced free vibration of sessile droplets using MEMS-based piezoresistive cantilevers. Lab Chip. 2015; 15(18):3670-6. DOI: 10.1039/c5lc00661a. View

15.

Shokawa T, Imazu M, Yamamoto H, Toyofuku M, Tasaki N, Okimoto T . Pulse wave velocity predicts cardiovascular mortality: findings from the Hawaii-Los Angeles-Hiroshima study. Circ J. 2005; 69(3):259-64. DOI: 10.1253/circj.69.259. View

16.

Lee S, Avolio A, Seo D, Kim B, Kang J, Lee M . Relationship Between Brachial-Ankle Pulse Wave Velocity and Incident Hypertension According to 2017 ACC/AHA High Blood Pressure Guidelines. J Am Heart Assoc. 2019; 8(16):e013019. PMC: 6759909. DOI: 10.1161/JAHA.119.013019. View

17.

Ohnishi H, Saitoh S, Takagi S, Ohata J, Isobe T, Kikuchi Y . Pulse wave velocity as an indicator of atherosclerosis in impaired fasting glucose: the Tanno and Sobetsu study. Diabetes Care. 2003; 26(2):437-40. DOI: 10.2337/diacare.26.2.437. View

18.

Cruickshank K, Riste L, Anderson S, Wright J, Dunn G, Gosling R . Aortic pulse-wave velocity and its relationship to mortality in diabetes and glucose intolerance: an integrated index of vascular function?. Circulation. 2002; 106(16):2085-90. DOI: 10.1161/01.cir.0000033824.02722.f7. View

19.

Koivistoinen T, Lyytikainen L, Aatola H, Luukkaala T, Juonala M, Viikari J . Pulse Wave Velocity Predicts the Progression of Blood Pressure and Development of Hypertension in Young Adults. Hypertension. 2018; 71(3):451-456. DOI: 10.1161/HYPERTENSIONAHA.117.10368. View

20.

WOOLAM G, SCHNUR P, VALLBONA C, Hoff H . The pulse wave velocity as an early indicator of atherosclerosis in diabetic subjects. Circulation. 1962; 25:533-9. DOI: 10.1161/01.cir.25.3.533. View