Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond Laser-assisted Chemomechanical Polish

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulator, which is achieved by femtosecond laser-assisted chemomechanical polish. We demonstrate a high-extinction-ratio beam splitter, a 1×6 optical switch, and a balanced 3×3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.