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Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator

Overview
Journal Nanomaterials (Basel)
Date 2019 Sep 1
PMID 31470545
Citations 6
Authors
Jianhao Zhang
Zhiwei Fang
Jintian Lin
Junxia Zhou
Min Wang
Rongbo Wu
Renhong Gao
Ya Cheng
Affiliations
Soon will be listed here.
Abstract

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

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