Large-area Synthesis of Monolayer and Few-layer MoSe2 Films on SiO2 Substrates

Overview

Journal Nano Lett

Publisher American Chemical Society

Specialty Biotechnology

Date 2014 Apr 1

PMID 24678857

Citations 38

Authors

Xin Lu

M Iqbal Bakti Utama

Junhao Lin

Xue Gong

Jun Zhang

Yanyuan Zhao

Sokrates T Pantelides

Jingxian Wang

Zhili Dong

Zheng Liu

Wu Zhou

Qihua Xiong

Affiliations

Soon will be listed here.

Abstract

We present successful synthesis of large area atomically thin MoSe2 films by selenization of MoO3 in a vapor transport chemical vapor deposition (CVD) system. The homogeneous thin film can reach an area of 1 × 1 cm(2) consisting primarily of monolayer and bilayer MoSe2 film. Scanning transmission electron microscopy (STEM) images reveal the highly crystalline nature of the thin film and the atomic structure of grain boundaries in monolayers. Raman and photoluminescence spectroscopy confirm the high quality of as-grown MoSe2 in optics, and electronic transport measurements highlight the potential applications of the sample in nanoelectronics.

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