Large Scale Metal-free Synthesis of Graphene on Sapphire and Transfer-free Device Fabrication

Overview

Journal Nanoscale

Specialty Biotechnology

Date 2012 Apr 25

PMID 22526246

Citations 18

Authors

Hyun Jae Song

Minhyeok Son

Chibeom Park

Hyunseob Lim

Mark P Levendorf

Adam W Tsen

Jiwoong Park

Hee Cheul Choi

Affiliations

Soon will be listed here.

Abstract

Metal catalyst-free growth of large scale single layer graphene film on a sapphire substrate by a chemical vapor deposition (CVD) process at 950 °C is demonstrated. A top-gated graphene field effect transistor (FET) device is successfully fabricated without any transfer process. The detailed growth process is investigated by the atomic force microscopy (AFM) studies.

Citing Articles

Memristors with Monolayer Graphene Electrodes Grown Directly on Sapphire Wafers.

Weng Z, Wallis R, Wingfield B, Evans P, Baginski P, Kainth J ACS Appl Electron Mater. 2024; 6(10):7276-7285.

PMID: 39464195 PMC: 11500406. DOI: 10.1021/acsaelm.4c01208.

Influence of Synthesis Parameters on Structure and Characteristics of the Graphene Grown Using PECVD on Sapphire Substrate.

Jankauskas S, Meskinis S, Zurauskiene N, Guobiene A Nanomaterials (Basel). 2024; 14(20).

PMID: 39452971 PMC: 11509920. DOI: 10.3390/nano14201635.

Synthesis of 2D PtSe Nanolayers on Glass Substrates and Their Integration in Near-Infrared Light Shutters.

Minev N, Buchkov K, Todorova N, Todorov R, Videva V, Stefanova M ACS Omega. 2024; 9(13):14874-14886.

PMID: 38585138 PMC: 10993254. DOI: 10.1021/acsomega.3c08235.

Chemical Vapor Deposition Growth of Graphene on 200 mm Ge(110)/Si Wafers and Ab Initio Analysis of Differences in Growth Mechanisms on Ge(110) and Ge(001).

Akhtar F, Dabrowski J, Lukose R, Wenger C, Lukosius M ACS Appl Mater Interfaces. 2023; 15(30):36966-36974.

PMID: 37479219 PMC: 10401564. DOI: 10.1021/acsami.3c05860.

Plasma-Induced Surface Modification of Sapphire and Its Influence on Graphene Grown by Plasma-Enhanced Chemical Vapour Deposition.

Lozano M, Bernat-Montoya I, Angelova T, Mojena A, Diaz-Fernandez F, Kovylina M Nanomaterials (Basel). 2023; 13(13).

PMID: 37446468 PMC: 10343755. DOI: 10.3390/nano13131952.