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Optical Interference Lithography Using Azobenzene-functionalized Polymers for Micro- and Nanopatterning of Silicon

Overview
Journal Adv Mater
Date 2011 Aug 9
PMID 21823180
Citations 8
Authors
Aleksandr Kravchenko
Andriy Shevchenko
Victor Ovchinnikov
Arri Priimagi
Matti Kaivola
Affiliations
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